Development of a mover having one nanometer precision and 4mm moving range
نویسندگان
چکیده
In order to have an experience on movers having a nanometer precision, a mover has been fabricated and its performance is tested. In the ILC, range of about 1mm is required to cure the long term drift of the tunnel floor and precision of some nanometers is required during the beam operation in IR (Interaction Region). To achieve these range and precision, the mover has two stages, coarse mover stage and precision one. The coarse mover stage is a cam mover type which has a moving range of 4mm and a precision of 0.1 micrometers. The precision mover utilizes piezoelectric transducers which have a moving range of 0.4 micrometers and 1 nanometer precision. Results of performance test are presented.
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